Experimental technique for fatigue testing of MEMS in liquids

Shaikh Mubassar Ali; Susan C. Mantell; Ellen K. Longmire

doi:10.1109/JMEMS.2012.2184082

Experimental technique for fatigue testing of MEMS in liquids

Shaikh Mubassar Ali, Susan C. Mantell, Ellen K. Longmire

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

An experimental technique for the fatigue testing of micro- electromechanical systems (MEMS) in liquid environments is described in this paper. A bulk-micromachined MEMS tensile specimen with integral grips was fabricated, and tensile-tensile fatigue tests were performed in air and in a saline solution. The fatigue life of the 200-nm thick aluminum specimen was observed to range from 1.2 × 10 ⁶ to 2.2 × 10 ⁶ cycles when tested at equal values of the mean and alternating stresses of 0.13 GPa.

Original language	English (US)
Article number	6150988
Pages (from-to)	520-522
Number of pages	3
Journal	Journal of Microelectromechanical Systems
Volume	21
Issue number	3
DOIs	https://doi.org/10.1109/JMEMS.2012.2184082
State	Published - 2012

Bibliographical note

Funding Information:
Manuscript received August 23, 2011; accepted November 16, 2011. Date of publication February 10, 2012; date of current version May 28, 2012. This work was supported in part by the National Science Foundation under Award Number CMS-0300125. Subject Editor C. Mastrangelo.

Keywords

Corrosion
fatigue
microelectromechanical systems (MEMS)
reliability
thin film

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AU - Longmire, Ellen K.

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Experimental technique for fatigue testing of MEMS in liquids

Abstract

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Keywords

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