TY - JOUR
T1 - Fabrication of an array of microcavities utilizing SU-8 photoresist as an alternative `LIGA' technology
AU - Roberts, Kevin
AU - Williamson, Fred
AU - Cibuzar, Greg
AU - Thomas, Lowell
PY - 1999/1/1
Y1 - 1999/1/1
N2 - This paper reports the use of SU-8 photoresist in the formation of an array of microcavities in polystyrene for biochemistry and combinatorial chemistry applications. Fabrication of the array involves hot embossing of polystyrene utilizing a nickel-cobalt micro-mold electroformed from the original SU-8 structure. For the particular applications being considered, the volume of the cavities necessitates a cavity depth of 100 microns. While conventional LIGA technology could be used, the use of a photoimageable spin-on layer capable of defining structures at a thickness well over 100 microns has greatly simplified the procedure. Additionally, such a method can put LIGA type processing in the hands of researchers without ready access to a synchrotron source. As such, this paper will cover the technical details of using SU-8 photoresist as it applies to the fabrication of a thermoplastic bio-MEMS structure.
AB - This paper reports the use of SU-8 photoresist in the formation of an array of microcavities in polystyrene for biochemistry and combinatorial chemistry applications. Fabrication of the array involves hot embossing of polystyrene utilizing a nickel-cobalt micro-mold electroformed from the original SU-8 structure. For the particular applications being considered, the volume of the cavities necessitates a cavity depth of 100 microns. While conventional LIGA technology could be used, the use of a photoimageable spin-on layer capable of defining structures at a thickness well over 100 microns has greatly simplified the procedure. Additionally, such a method can put LIGA type processing in the hands of researchers without ready access to a synchrotron source. As such, this paper will cover the technical details of using SU-8 photoresist as it applies to the fabrication of a thermoplastic bio-MEMS structure.
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M3 - Conference article
AN - SCOPUS:0032660921
SN - 0749-6877
SP - 139
EP - 141
JO - Biennial University/Government/Industry Microelectronics Symposium - Proceedings
JF - Biennial University/Government/Industry Microelectronics Symposium - Proceedings
T2 - Proceedings of the 1999 13th Biennial University / Goverment / Industry Microelectronics Symposium (UGIM)
Y2 - 20 June 1999 through 23 June 1999
ER -
