Abstract
We report on the formation of a lateral comb drive on poly-methyl-meth-acrylate (PMMA) using the hot embossing technique. A hot embossing mold insert is fabricated on a silicon wafer by means of lithography and inductive coupled plasma dry etching. The comb drive microstructure is hot embossed under a molding force of 35000 N at 130°C. We demonstrate the comb drive, 80 units of interdigitated parallel capacitors with the finger gap and width both being 10 μm. The minimum feature size is 5 μm and the thickness of the structure is 60 μm, which makes the aspect ratio 12:1. The comb drive strokes 5 μm under an actuation potential of 180 V. We also present a brief description of the design and simulation with ANSYS.
Original language | English (US) |
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Pages (from-to) | 430-435 |
Number of pages | 6 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 13 |
Issue number | 3 |
DOIs | |
State | Published - May 2003 |