Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification

Ji Huang, Lan Jiang, Xiaowei Li, Andong Wang, Zhi Wang, Qingsong Wang, Jie Hu, Liangti Qu, Tianhong Cui, Yongfeng Lu

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Engineering & Materials Science

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Chemical Compounds