Fabrication of integrated pressure-flow-temperature sensor for hydraulic systems

Charles W. Groepper, Tianhong Cui, Perry Y. Li, Kim A. Stelson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work develops a low cost multi-functional micro-electro mechanical systems (MEMS) sensor for use in fluid power systems. The device is small to facilitate easy integration into fluid power components, and has the capability to sense system pressure, fluid temperature, and small pressure differences that can be correlated to flow rate. The design of each of the sensing aspects of the device is outlined, as well as their layout on the sensor die. Pressure sensing with the device is accomplished through the use of polysilicon piezoresistors, while temperature sensing is accomplished using polysilicon thermisters. The procedure necessary to fabricate prototype units is illustrated in detail, and special processes noted. Performance characteristics of prototype sensors compare well to design model predictions. The polysilicon thermister demonstrated a linearity of 2.32%, a repeatability of 0.6%, and an accuracy of 1.5°C. The differential pressure sensor demonstrated a linearity of 0.4%, a repeatability of 0.13%, and an accuracy of 3.6%. The system pressure sensor demonstrated a linearity of 0.7%, a repeatability of 0.3% and an accuracy of 4.2%. These performance characteristics prove the functionality of the device.

Original languageEnglish (US)
Title of host publicationProceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Fluid Power Systems and Technology Division
PublisherAmerican Society of Mechanical Engineers (ASME)
ISBN (Print)0791837904, 9780791837900
DOIs
StatePublished - Jan 1 2006
Event2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Chicago, IL, United States
Duration: Nov 5 2006Nov 10 2006

Publication series

NameAmerican Society of Mechanical Engineers, The Fluid Power and Systems Technology Division, FPST
ISSN (Print)1071-6947

Other

Other2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006
CountryUnited States
CityChicago, IL
Period11/5/0611/10/06

Keywords

  • Fluid power
  • MEMS
  • Pressure
  • Sensing
  • Temperature
  • Transducer

Fingerprint Dive into the research topics of 'Fabrication of integrated pressure-flow-temperature sensor for hydraulic systems'. Together they form a unique fingerprint.

Cite this