Fabrication of submicron wire networks using electron beam lithography

Richard J. Bojko, Richard Tiberio, Brian Whitehead, Allen M. Goldman, James Gordon, Fang Yu, Paul M. Chaikin, Carlos Wilks, Mark Itzler

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


We have fabricated and studied superconducting wire networks with various geometrical properties including fractal, periodic, quasi-periodic, and random. We will discuss design and fabrication of these aluminum networks, which consist of nearly one million elements and span a square millimeter. We will present results of several studies of these networks.

Original languageEnglish (US)
Pages (from-to)31-34
Number of pages4
JournalMicroelectronic Engineering
Issue number1-4
StatePublished - Apr 1990

Bibliographical note

Funding Information:
Fabrication of these wire networks begins with preparation of the pattern data. Typically this is accomplished by coding an appropriate algorithm in a high-level language such as Pascal or Fortran. Structured languages which allow recursion are particularly useful in defining fractal patterns which are self-similar. or recursive. Execution of the program * Deceased. +The National Nanofabrication Facility is supported by the National Science Foundation under Grant # ECS-8619049. Cornell University. and Industrial Affiliates. 5 Supported by the Microelectronic and Information Science Center of the Univ. of Minnesota. and by the Low Temperature Physics Program of the National Science Foundation under Grant # DMR-850385. t-supported in part by the National Science Foundation under Grant # DMR-8813724.


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