Fabrication of vertically aligned single-walled carbon nanotubes in atmospheric pressure non-thermal plasma CVD

Engineering & Materials Science

• Plasma CVD 100%
• Single-walled carbon nanotubes (SWCN) 75%
• Atmospheric pressure 61%
• Fabrication 40%
• Ions 20%
• Optical emission spectroscopy 18%
• Plasma enhanced chemical vapor deposition 15%
• Substrates 15%
• Chemical vapor deposition 12%
• Molecules 10%
• Catalysts 9%
• Carbon 8%
• Defects 7%
• Hot Temperature 5%

Chemical Compounds

• Plasma Chemical Vapour Deposition 74%
• Single Walled Nanotube 50%
• Pressure 31%
• Optical Emission Spectroscopy 13%
• Plasma Enhanced Chemical Vapour Deposition 13%
• Collision 10%
• Drop 9%
• Ion 8%
• Carbon Atom 5%
• Catalyst 4%
• Molecule 3%