This paper reviews the current state of ferroelectric-based microactuators. The advantages of ferroelectric-based microactuation are considered. Several actuator concepts are discussed including unimorph-based cantilever actuators, membrane-based micropumps, linear positioning actuators using folded geometries of cascaded elementary actuators for both in-plane and out-of-plane displacements, linear stepper motors using inch-worm geometries, and ultrasonic-based micromotors. Optimistic, order-of-magnitude estimates of actuator performance are given based on simple, idealized analysis. Processing issues in fabricating ferroelectric-based microactuators are also considered.
Bibliographical noteFunding Information:
This work was partially supported by the National Science Foundation (grant number NSFEID-9212159).