Ferroelectric thin films in microelectromechanical systems applications

D. L. Polla, L. F. Francis

Research output: Contribution to journalArticlepeer-review

274 Scopus citations
Original languageEnglish (US)
Pages (from-to)59-65
Number of pages7
JournalMRS Bulletin
Volume21
Issue number7
DOIs
StatePublished - Jul 1996

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