Abstract
Methods are shown for finding refractive indexes of thin dielectric films on weakly absorbing dielectric substrates and also the film thickness. The technique is based on a single measured distribution of monochromatic, specular reflectance as a function of incidence angle.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 1392-1396 |
| Number of pages | 5 |
| Journal | J Opt Soc Amer |
| Volume | 61 |
| Issue number | 10 |
| State | Published - Jan 1 1971 |