Film thickness and refractive indices of dielectric films on dielectric substrates

M RUIZ-URBIETA M, EM SPARROW EM, ERG ECKERT ERG

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

Methods are shown for finding refractive indexes of thin dielectric films on weakly absorbing dielectric substrates and also the film thickness. The technique is based on a single measured distribution of monochromatic, specular reflectance as a function of incidence angle.

Original languageEnglish (US)
Pages (from-to)1392-1396
Number of pages5
JournalJ Opt Soc Amer
Volume61
Issue number10
StatePublished - Jan 1 1971

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