Methods are shown for finding refractive indexes of thin dielectric films on weakly absorbing dielectric substrates and also the film thickness. The technique is based on a single measured distribution of monochromatic, specular reflectance as a function of incidence angle.
|Original language||English (US)|
|Number of pages||5|
|Journal||J Opt Soc Amer|
|State||Published - Jan 1 1971|