Finite element analysis of hollow HfO2 microneedles for transdermal drug delivery

Yong Hua Zhang; Yinghong Tian; Stephen A. Campbell

doi:10.1109/CISP-BMEI.2017.8302245

Finite element analysis of hollow HfO₂ microneedles for transdermal drug delivery

Yong Hua Zhang, Yinghong Tian, Stephen A. Campbell

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Microneedles are an important tool for promoting transdermal drug delivery, especially for macromolecular drugs. In this paper, the fabrication method of hollow hafnium oxide (HfO₂) microneedles mainly based on deep reactive ion etching of silicon and atomic layer deposition of HfO₂, and the finite element analysis of the microneedles based on ANSYS software are presented. The fabrication process is simplified by using only one mask. The finite element analysis of a single microneedle shows that the flexibility of the microneedles can be easily adjusted for various applications. The finite element analysis of a 3×3 HfO₂ microneedle array applied on the skin explains the 'bed of nail' effect nicely, i.e., the skin is not liable to be pierced when the density of microneedles in array increases. The presented research work here provides useful information for design optimization of HfO₂ microneedles.

Original language	English (US)
Title of host publication	Proceedings - 2017 10th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2017
Editors	Song Qiu, Hongying Liu, Li Sun, Lipo Wang, Qingli Li, Mei Zhou
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1-6
Number of pages	6
ISBN (Electronic)	9781538619377
DOIs	https://doi.org/10.1109/CISP-BMEI.2017.8302245
State	Published - Feb 22 2018
Event	10th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2017 - Shanghai, China Duration: Oct 14 2017 → Oct 16 2017

Publication series

Name	Proceedings - 2017 10th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2017
Volume	2018-January

Other

Other	10th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2017
Country	China
City	Shanghai
Period	10/14/17 → 10/16/17

Keywords

Finite element analysis
HfO
atomic layer deposition
bed of nail effect
micro-electro-mechanical systems
microneedle
transdermal drug delivery

Access

10.1109/CISP-BMEI.2017.8302245

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Cite this

Zhang, Y. H., Tian, Y., & Campbell, S. A. (2018). Finite element analysis of hollow HfO₂ microneedles for transdermal drug delivery. In S. Qiu, H. Liu, L. Sun, L. Wang, Q. Li, & M. Zhou (Eds.), Proceedings - 2017 10th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2017 (pp. 1-6). (Proceedings - 2017 10th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2017; Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CISP-BMEI.2017.8302245

Finite element analysis of hollow HfO₂ microneedles for transdermal drug delivery. / Zhang, Yong Hua; Tian, Yinghong; Campbell, Stephen A.

Proceedings - 2017 10th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2017. ed. / Song Qiu; Hongying Liu; Li Sun; Lipo Wang; Qingli Li; Mei Zhou. Institute of Electrical and Electronics Engineers Inc., 2018. p. 1-6 (Proceedings - 2017 10th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2017; Vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Zhang, YH, Tian, Y & Campbell, SA 2018, Finite element analysis of hollow HfO₂ microneedles for transdermal drug delivery. in S Qiu, H Liu, L Sun, L Wang, Q Li & M Zhou (eds), Proceedings - 2017 10th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2017. Proceedings - 2017 10th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2017, vol. 2018-January, Institute of Electrical and Electronics Engineers Inc., pp. 1-6, 10th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2017, Shanghai, China, 10/14/17. https://doi.org/10.1109/CISP-BMEI.2017.8302245

Zhang YH, Tian Y, Campbell SA. Finite element analysis of hollow HfO₂ microneedles for transdermal drug delivery. In Qiu S, Liu H, Sun L, Wang L, Li Q, Zhou M, editors, Proceedings - 2017 10th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2017. Institute of Electrical and Electronics Engineers Inc. 2018. p. 1-6. (Proceedings - 2017 10th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2017). https://doi.org/10.1109/CISP-BMEI.2017.8302245

Zhang, Yong Hua ; Tian, Yinghong ; Campbell, Stephen A. / Finite element analysis of hollow HfO₂ microneedles for transdermal drug delivery. Proceedings - 2017 10th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2017. editor / Song Qiu ; Hongying Liu ; Li Sun ; Lipo Wang ; Qingli Li ; Mei Zhou. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 1-6 (Proceedings - 2017 10th International Congress on Image and Signal Processing, BioMedical Engineering and Informatics, CISP-BMEI 2017).

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abstract = "Microneedles are an important tool for promoting transdermal drug delivery, especially for macromolecular drugs. In this paper, the fabrication method of hollow hafnium oxide (HfO2) microneedles mainly based on deep reactive ion etching of silicon and atomic layer deposition of HfO2, and the finite element analysis of the microneedles based on ANSYS software are presented. The fabrication process is simplified by using only one mask. The finite element analysis of a single microneedle shows that the flexibility of the microneedles can be easily adjusted for various applications. The finite element analysis of a 3×3 HfO2 microneedle array applied on the skin explains the 'bed of nail' effect nicely, i.e., the skin is not liable to be pierced when the density of microneedles in array increases. The presented research work here provides useful information for design optimization of HfO2 microneedles.",

keywords = "Finite element analysis, HfO, atomic layer deposition, bed of nail effect, micro-electro-mechanical systems, microneedle, transdermal drug delivery",

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N2 - Microneedles are an important tool for promoting transdermal drug delivery, especially for macromolecular drugs. In this paper, the fabrication method of hollow hafnium oxide (HfO2) microneedles mainly based on deep reactive ion etching of silicon and atomic layer deposition of HfO2, and the finite element analysis of the microneedles based on ANSYS software are presented. The fabrication process is simplified by using only one mask. The finite element analysis of a single microneedle shows that the flexibility of the microneedles can be easily adjusted for various applications. The finite element analysis of a 3×3 HfO2 microneedle array applied on the skin explains the 'bed of nail' effect nicely, i.e., the skin is not liable to be pierced when the density of microneedles in array increases. The presented research work here provides useful information for design optimization of HfO2 microneedles.

AB - Microneedles are an important tool for promoting transdermal drug delivery, especially for macromolecular drugs. In this paper, the fabrication method of hollow hafnium oxide (HfO2) microneedles mainly based on deep reactive ion etching of silicon and atomic layer deposition of HfO2, and the finite element analysis of the microneedles based on ANSYS software are presented. The fabrication process is simplified by using only one mask. The finite element analysis of a single microneedle shows that the flexibility of the microneedles can be easily adjusted for various applications. The finite element analysis of a 3×3 HfO2 microneedle array applied on the skin explains the 'bed of nail' effect nicely, i.e., the skin is not liable to be pierced when the density of microneedles in array increases. The presented research work here provides useful information for design optimization of HfO2 microneedles.

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KW - atomic layer deposition

KW - bed of nail effect

KW - micro-electro-mechanical systems

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