Fluid-structure coupling analysis and simulation of a micromachined piezo microjet

Changgeng Liu; Tianhong Cui; Zhaoying Zhou; Kun Lian; Jost Goettert

doi:10.1016/j.sna.2003.11.019

Fluid-structure coupling analysis and simulation of a micromachined piezo microjet

Changgeng Liu, Tianhong Cui, Zhaoying Zhou, Kun Lian, Jost Goettert

Mechanical Engineering

Research output: Contribution to journal › Conference article › peer-review

7 Scopus citations

Abstract

A piezoelectric microjet has been fabricated and its working mechanism has been investigated. Considering different physical effects, the coupling models of the device are established and the key characteristics of the microjet are simulated by finite-element method. The dynamic displacement responses of the transducer under liquid-loading and unloading are calculated and compared. From numerical results, the coupling interactions dramatically damp the vibration amplitude of the transducer. However, the effects on the resonant frequencies of the structure are negligible, which will save much calculation work during further design optimization of the device. Based on the optimal design rules, the device has been fabricated and characterized.

Original language	English (US)
Pages (from-to)	460-465
Number of pages	6
Journal	Sensors and Actuators, A: Physical
Volume	114
Issue number	2-3
DOIs	https://doi.org/10.1016/j.sna.2003.11.019
State	Published - Sep 1 2004
Event	Selected Papers from Transducers 03 - Boston, MA, United States Duration: Jun 8 2003 → Jun 12 2003

Bibliographical note

Funding Information:
Financial support by National Natural Science Funds (29833070) and National 973 Basic Research Projects (G1999033106) of China is deeply appreciated.

Keywords

Coupling analysis
Microjet
Micromachining
Simulation

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/j.sna.2003.11.019

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title = "Fluid-structure coupling analysis and simulation of a micromachined piezo microjet",

abstract = "A piezoelectric microjet has been fabricated and its working mechanism has been investigated. Considering different physical effects, the coupling models of the device are established and the key characteristics of the microjet are simulated by finite-element method. The dynamic displacement responses of the transducer under liquid-loading and unloading are calculated and compared. From numerical results, the coupling interactions dramatically damp the vibration amplitude of the transducer. However, the effects on the resonant frequencies of the structure are negligible, which will save much calculation work during further design optimization of the device. Based on the optimal design rules, the device has been fabricated and characterized.",

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AU - Liu, Changgeng

AU - Cui, Tianhong

AU - Zhou, Zhaoying

AU - Lian, Kun

AU - Goettert, Jost

N1 - Funding Information: Financial support by National Natural Science Funds (29833070) and National 973 Basic Research Projects (G1999033106) of China is deeply appreciated.

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Y1 - 2004/9/1

N2 - A piezoelectric microjet has been fabricated and its working mechanism has been investigated. Considering different physical effects, the coupling models of the device are established and the key characteristics of the microjet are simulated by finite-element method. The dynamic displacement responses of the transducer under liquid-loading and unloading are calculated and compared. From numerical results, the coupling interactions dramatically damp the vibration amplitude of the transducer. However, the effects on the resonant frequencies of the structure are negligible, which will save much calculation work during further design optimization of the device. Based on the optimal design rules, the device has been fabricated and characterized.

AB - A piezoelectric microjet has been fabricated and its working mechanism has been investigated. Considering different physical effects, the coupling models of the device are established and the key characteristics of the microjet are simulated by finite-element method. The dynamic displacement responses of the transducer under liquid-loading and unloading are calculated and compared. From numerical results, the coupling interactions dramatically damp the vibration amplitude of the transducer. However, the effects on the resonant frequencies of the structure are negligible, which will save much calculation work during further design optimization of the device. Based on the optimal design rules, the device has been fabricated and characterized.

KW - Coupling analysis

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KW - Micromachining

KW - Simulation

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Fluid-structure coupling analysis and simulation of a micromachined piezo microjet

Abstract

Bibliographical note

Keywords

UN SDGs

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