Formation of water aerosols during pump-down of vacuum process tools

Jun Zhao, Benjamin Y.H. Liu, Thomas H Kuehn

Research output: Contribution to specialist publicationArticle

8 Scopus citations

Abstract

Water aerosol formation mechanisms and characteristics, including the pressure and temperature in which the formation occurs, are reviewed and a criterion to prevent water aerosol formation is presented.

Original languageEnglish (US)
Pages85-89
Number of pages5
Volume33
No9
Specialist publicationSolid State Technology
StatePublished - Sep 1 1990

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