Fringe-field-activated SOI tilting mirrors

D. S. Greywall, Chien Shing Pai, Sang Hyun Oh, Chorng Ping Chang, D. M. Marom, S. Stanton, P. A. Busch, R. A. Cirelli, J. A. Taylor, F. P. Klemens, T. W. Sorsch, J. E. Bower, W. Y C Lai, H. T. Soh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science