Functional 1.6 GHZ MEMS switch using aligned composite CNT membrane by dielectrophoretic self-assembly

M. W. Jang; M. Lu; T. Cui; S. A. Campbell

doi:10.1109/SENSOR.2009.5285936

Functional 1.6 GHZ MEMS switch using aligned composite CNT membrane by dielectrophoretic self-assembly

M. W. Jang, M. Lu, T. Cui, S. A. Campbell

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

Abstract

This paper demonstrates fixed-beam switches using well-aligned composite SWNT membranes, which were prepared by dielectrophoretic process with Layer-by-Layer self-assembly. The measured DC pull-in voltages ranged from 0.9 V to 4.8 V, depending on the length of switches. AC measurements indicate a switching delay as low as 600 psec for 300 nm beams. This new SWNT composite membrane switch is promising for a variety of applications to high-end nanoelectronics and high- performance MEMS/NEMS.

Original language	English (US)
Title of host publication	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Publisher	IEEE Computer Society
Pages	912-915
Number of pages	4
ISBN (Print)	9781424441938
DOIs	https://doi.org/10.1109/SENSOR.2009.5285936
State	Published - 2009
Event	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States Duration: Jun 21 2009 → Jun 25 2009

Publication series

Name	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Country/Territory	United States
City	Denver, CO
Period	6/21/09 → 6/25/09

Keywords

Aligned composite SWNT membrane
Dielectrophoretic process
Fixed-beam switch
Layer-by-layer self-assembly

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10.1109/SENSOR.2009.5285936

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Jang, M. W., Lu, M., Cui, T., & Campbell, S. A. (2009). Functional 1.6 GHZ MEMS switch using aligned composite CNT membrane by dielectrophoretic self-assembly. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 912-915). Article 5285936 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). IEEE Computer Society. https://doi.org/10.1109/SENSOR.2009.5285936

Functional 1.6 GHZ MEMS switch using aligned composite CNT membrane by dielectrophoretic self-assembly. / Jang, M. W.; Lu, M.; Cui, T. et al.
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE Computer Society, 2009. p. 912-915 5285936 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Jang, MW, Lu, M, Cui, T & Campbell, SA 2009, Functional 1.6 GHZ MEMS switch using aligned composite CNT membrane by dielectrophoretic self-assembly. in TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems., 5285936, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, IEEE Computer Society, pp. 912-915, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, United States, 6/21/09. https://doi.org/10.1109/SENSOR.2009.5285936

Jang MW, Lu M, Cui T , Campbell SA. Functional 1.6 GHZ MEMS switch using aligned composite CNT membrane by dielectrophoretic self-assembly. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE Computer Society. 2009. p. 912-915. 5285936. (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/SENSOR.2009.5285936

Jang, M. W. ; Lu, M. ; Cui, T. et al. / Functional 1.6 GHZ MEMS switch using aligned composite CNT membrane by dielectrophoretic self-assembly. TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. IEEE Computer Society, 2009. pp. 912-915 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).

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Functional 1.6 GHZ MEMS switch using aligned composite CNT membrane by dielectrophoretic self-assembly

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