Abstract
Gallium arsenide (GaAs) based microaccelerometers are being developed for guidance and navigation subsystems, and various microsensor systems. The microaccelerometer is a microelectromechanical system (MEMs) micromachined on top of GaAs substrate or GaAs integrated circuits. The MEMS accelerometer is integrated on the same chip as the GaAs readout circuit and the GaAs analog to digital converter. Test and prototype chips are developed.
Original language | English (US) |
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Title of host publication | Midwest Symposium on Circuits and Systems |
Editors | Anon |
Publisher | IEEE |
Pages | 1111-1115 |
Number of pages | 5 |
Volume | 2 |
State | Published - Dec 1 1997 |
Event | Proceedings of the 1997 40th Midwest Symposium on Circuits and Systems. Part 1 (of 2) - Sacramento, CA, USA Duration: Aug 3 1997 → Aug 6 1997 |
Other
Other | Proceedings of the 1997 40th Midwest Symposium on Circuits and Systems. Part 1 (of 2) |
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City | Sacramento, CA, USA |
Period | 8/3/97 → 8/6/97 |