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Gas-assisted electron-beam-induced nanopatterning of high-quality Si-based insulator
A. V. Riazanova, B. N. Costanzi, A. Aristov, Y. G.M. Rikers, V. Ström, J. J.L. Mulders, A. V. Kabashin, E. Dan Dahlberg, L. M. Belova
Research output: Contribution to journal › Article › peer-review
13
Scopus
citations