Graphene cantilever beams for nano switches

Peng Li; Zheng You; Tianhong Cui

doi:10.1063/1.4738891

Graphene cantilever beams for nano switches

Peng Li, Zheng You, Tianhong Cui

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

51 Scopus citations

Abstract

A method named sacrificial beam is presented to fabricate graphene cantilever devices. The mechanical properties of graphene cantilevers are studied using atomic force microscopy. Graphene cantilever based 2-terminal nano-electro-mechanical systems switches are demonstrated, and their DC characteristics and switch performance are investigated. A 3-terminal switch based on a graphene cantilever is fabricated, and its electrical properties are also studied.

Original language	English (US)
Article number	093111
Journal	Applied Physics Letters
Volume	101
Issue number	9
DOIs	https://doi.org/10.1063/1.4738891
State	Published - Aug 27 2012

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Copyright 2012 Elsevier B.V., All rights reserved.

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Graphene cantilever beams for nano switches

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