Group IVB metal oxides high permittivity gate insulators deposited from anhydrous metal nitrates

Tiezhong Ma, Stephen A. Campbell, Ryan Smith, Noel Hoilien, Boyong He, Wayne L. Gladfelter, Christopher Hobbs, Doug Buchanan, Charles Taylor, Michael Gribelyuk, Mike Tiner, Matthew Coppel, Jang Jung Lee

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Engineering & Materials Science

Chemical Compounds