Growth of high-quality SrTiO3 films using a hybrid molecular beam epitaxy approach

Engineering & Materials Science

• Molecular beam epitaxy 100%
• Reflection high energy electron diffraction 33%
• Plasma sources 26%
• Full width at half maximum 23%
• Substrates 22%
• Stoichiometry 21%
• Surface reconstruction 21%
• Positive ions 20%
• Diffraction 17%
• Titanium 15%
• X rays 14%
• Surface roughness 13%
• Fluxes 13%
• Oxygen 13%
• Metals 10%

Chemical Compounds

• Molecular Beam Epitaxy 92%
• Liquid Film 31%
• Reflection High Energy Electron Diffraction 26%
• Surface Reconstruction 22%
• Surface Roughness 16%
• Reaction Stoichiometry 13%
• Plasma 10%
• Cation 9%
• Dioxygen 7%
• Surface 5%

Physics & Astronomy

• molecular beam epitaxy 54%
• oscillations 16%
• high energy electrons 12%
• stoichiometry 12%
• x ray diffraction 11%
• electron diffraction 10%
• surface roughness 10%
• cations 10%
• arcs 10%
• titanium 10%
• oxygen 7%
• curves 7%
• cells 6%
• metals 6%