@inproceedings{34c02b307287419391b26e60ff1d66f3,
title = "Heat and temperature in micromechanical systems",
author = "Talghader, {Joseph J.}",
year = "2005",
month = dec,
day = "1",
language = "English (US)",
isbn = "1424400848",
series = "2005 International Semiconductor Device Research Symposium",
pages = "258--259",
booktitle = "2005 International Semiconductor Device Research Symposium",
note = "2005 International Semiconductor Device Research Symposium ; Conference date: 07-12-2005 Through 09-12-2005",
}