The mixed-potential-type NO2 sensor based on a yttria-stabilized zirconia (YSZ) electrolyte with NiO sensing electrode and a three-phase boundary (TPB) was fabricated. The ion beam etching (IBE) technology with low energy was employed to etch the YSZ substrate for the first time. The characterization result indicates that the YSZ substrate prepared by argon ion (Ar+) beam with different incident angles (10° and 40°) obtains hollow and spike patterns on the surface, respectively. The sensing performance was improved by the self-organized nanostructures of TPB, which enhances the contact area obviously. The sensor using a YSZ substrate processed by 10° incident angle with 800 eV/60 mA energy demonstrates the largest response compared with other parameters to NO2 at 850 °C. Sensitivity of the sensors is achieved as 40.7 mV/decade, about 1.9 times as the initial YSZ substrate. In addition, the sensor also has good response-recovery transients, repeatability and selectivity.
Bibliographical noteFunding Information:
This work was financially supported by the Open Fund of the State Key Laboratory on Integrated Optoelectronics (Grant No. IOSKL2017KF09) and the State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University. The authors also thank the State Key Laboratory on Integrated Optoelectronics, Jilin University, for the provision of fabrication and measurement service.
© 2018 Elsevier B.V.
- Ion beam etching
- NO sensing
- Self-organized nanostructure