@inproceedings{dd41616f73d24043b354e84d8ddecf69,
title = "High-speed optical interferometry of micro and nanothermal wave propagation induced by current flow in metal interconnect lines",
abstract = "Thermal deformation waves in a soda-lime-silica glass substrate were measured using high-speed Hilbert-phase interferometry during interconnect heating and Q-switched Nd:YAG irradiation. 100-microsecond thermal events were captured with 256x256 resolution over a 100 micron square area.",
keywords = "heat transfer, high-speed camera, interferometry, laser damage, thermal damage, thermal monitoring",
author = "Taylor, {Lucas N.} and Talghader, {Joseph J.}",
year = "2015",
month = oct,
day = "2",
doi = "10.1109/OMN.2015.7288881",
language = "English (US)",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
booktitle = "OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings",
note = "International Conference on Optical MEMS and Nanophotonics, OMN 2015 ; Conference date: 02-08-2015 Through 05-08-2015",
}