## Abstract

In a recent study Gao et al. have examined the assumption of a Maxwellian electron distribution function for an inductively coupled Argon plasma at atmospheric pressure. By solving the Boltzmann equation the authors demonstrate that in fact deviations from a Maxwellian distribution can be detected. In this presentation we revisit the conclusions obtained in [1]. At atmospheric pressures and excitation frequencies of 3.0 MHz and 27.1 MHz it is not obvious that the electron distribution function (EDF) can be derived from the steady-state Boltzmann equation. For low degrees of ionization and at atmospheric pressure, the EDF would show a strong temporal modulation in the high energy part due to inelastic collisions. At high degrees of ionization, Coulomb collisions can dampen these oscillations and lead to a less modulated EDF tail. In this presentation, we discuss the EDF formation for the conditions presented in [1]. We present results from solutions of the electron Boltzmann equation and discuss possible deviations from non-Maxwellian distribution functions.

Original language | English (US) |
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Title of host publication | IEEE International Conference on Plasma Science |

Publisher | IEEE |

Pages | 221 |

Number of pages | 1 |

State | Published - 2000 |

Event | ICOPS 2000 - 27th IEEE International Conference on Plasma Science - New Orleans, LA, USA Duration: Jun 4 2000 → Jun 7 2000 |

### Other

Other | ICOPS 2000 - 27th IEEE International Conference on Plasma Science |
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City | New Orleans, LA, USA |

Period | 6/4/00 → 6/7/00 |