Impact of micromirror seidel aberrations on microcavity spectra

Wei Liu; Joseph J. Talghader

Impact of micromirror seidel aberrations on microcavity spectra

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The stress-induced deformation of micromirrors is examined in terms of common Seidel aberrations, and its impact on microcavity spectra is quantified. Tilt, curvature, and astigmatism cause characteristic changes in the spectra, but coma and spherical aberration are often negligible.

Original language	English (US)
Title of host publication	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Pages	58-59
Number of pages	2
State	Published - Dec 1 2006
Event	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 - Big Sky, MT, United States Duration: Aug 21 2006 → Aug 24 2006

Publication series

Name	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Other

Other	IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006
Country/Territory	United States
City	Big Sky, MT
Period	8/21/06 → 8/24/06

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Impact of micromirror seidel aberrations on microcavity spectra. / Liu, Wei; Talghader, Joseph J.
IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. 2006. p. 58-59 1708263 (IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Liu, W & Talghader, JJ 2006, Impact of micromirror seidel aberrations on microcavity spectra. in IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006., 1708263, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, pp. 58-59, IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, Big Sky, MT, United States, 8/21/06.

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ER -

Impact of micromirror seidel aberrations on microcavity spectra

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