Fingerprint
Dive into the research topics of '"Incompressible" pore effect on the mechanical behavior of low-K dielectric films'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
"Incompressible" pore effect on the mechanical behavior of low-K dielectric films
Alex A. Volinsky, Manuel Luis B. Palacio, William W. Gerberich
Research output: Contribution to journal › Conference article › peer-review
3
Scopus
citations