Influence of ion-beam sputtering deposition parameters on highly photosensitive and transparent CdZnO thin films

Engineering & Materials Science

• Ion beams 89%
• Sputtering 80%
• Thin films 59%
• Photosensitivity 29%
• Substrates 19%
• Photoluminescence 14%
• Electronic properties 13%
• Diffraction patterns 12%
• Cadmium 12%
• Sapphire 11%
• Optical properties 11%
• Partial pressure 10%
• Optoelectronic devices 10%
• Energy gap 10%
• Argon 10%
• X ray diffraction 8%
• Temperature 7%
• Gases 5%

Chemical Compounds

• Ion Beam Sputtering 100%
• Liquid Film 30%
• Photosensitivity 22%
• Optoelectronics 16%
• Deposition Technique 9%
• Partial Pressure 8%
• Polycrystalline Solid 8%
• Photoluminescence 6%
• Band Gap 6%
• Optical Property 6%
• Gas 4%
• X-Ray Diffraction 4%