Integrated silicon and silicon nitride photonic circuits on flexible substrates

Yu Chen, Mo Li

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

Flexible integrated photonic devices based on crystalline materials on plastic substrates have a promising potential in many unconventional applications. In this Letter, we demonstrate a fully integrated photonic system including ring resonators and grating couplers, based on both crystalline silicon and silicon nitride, on flexible plastic substrate by using the stamping-transfer method. A high yield has been achieved by a simple, yet reliable transfer method without significant performance degradation.

Original languageEnglish (US)
Pages (from-to)3449-3452
Number of pages4
JournalOptics Letters
Volume39
Issue number12
DOIs
StatePublished - Jun 15 2014

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