Integration of yttrium iron garnet films via reactive RF sputtering

Engineering & Materials Science

• Yttrium iron garnet 100%
• Sputtering 78%
• Reactive sputtering 64%
• Oxygen 49%
• Magnetooptical devices 46%
• Annealing 40%
• Amorphous films 33%
• Garnets 32%
• Cerium 29%
• Substrates 28%
• Doping (additives) 22%
• Metals 13%
• Gases 11%
• Networks (circuits) 11%

Physics & Astronomy

• yttrium-iron garnet 70%
• sputtering 47%
• oxygen 27%
• annealing 18%
• isolators 18%
• cerium 17%
• garnets 16%
• buffers 12%
• gases 7%
• metals 7%

Chemical Compounds

• Sputtering 66%
• Liquid Film 29%
• Annealing 24%
• Reactive Sputtering 22%
• Dioxygen 22%
• Polycrystalline Solid 13%
• Amorphous Material 10%
• Buffer Solution 9%
• Gas 8%
• Metal 6%