Investigation of Aerosol Spatial Distributions Downstream of a Critical Orifice at Low Pressure

Gwi Nam Bae; Patrick D. Kinney; Benjamin Y.H. Liu; David Y.H. Pui

doi:10.1080/02786829808965539

Investigation of Aerosol Spatial Distributions Downstream of a Critical Orifice at Low Pressure

Gwi Nam Bae, Patrick D. Kinney, Benjamin Y.H. Liu, David Y.H. Pui

Mechanical Engineering

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Abstract

The spatial distribution of aerosol particles downstream of a critical orifice has been experimentally investigated. The measurements were performed by filtering the aerosol and visualizing the filter deposits. Measurements were made for a range of flow rates, pressures, and particle sizes. The most significant observation was that the particle spatial distributions changed from uniform to nonuniform when the downstream pressure was lowered below about 10 torr. Similar observations were made using in-situ particle monitors. These results may have significance for understanding particulate contamination in vacuum-based semiconductor process equipment.

Original language	English (US)
Pages (from-to)	479-488
Number of pages	10
Journal	Aerosol Science and Technology
Volume	28
Issue number	6
DOIs	https://doi.org/10.1080/02786829808965539
State	Published - Jan 1 1998

Bibliographical note

Funding Information:
This work was supported Jinancially by a grant &on1 the Microconturnination Reseurck Consortium ut the Ukiver-sity of' Minnesota. The support of the Conso&un is grate-fidly ucknowled&.

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title = "Investigation of Aerosol Spatial Distributions Downstream of a Critical Orifice at Low Pressure",

abstract = "The spatial distribution of aerosol particles downstream of a critical orifice has been experimentally investigated. The measurements were performed by filtering the aerosol and visualizing the filter deposits. Measurements were made for a range of flow rates, pressures, and particle sizes. The most significant observation was that the particle spatial distributions changed from uniform to nonuniform when the downstream pressure was lowered below about 10 torr. Similar observations were made using in-situ particle monitors. These results may have significance for understanding particulate contamination in vacuum-based semiconductor process equipment.",

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note = "Funding Information: This work was supported Jinancially by a grant &on1 the Microconturnination Reseurck Consortium ut the Ukiver-sity of' Minnesota. The support of the Conso&un is grate-fidly ucknowled&.",

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AU - Liu, Benjamin Y.H.

AU - Pui, David Y.H.

N1 - Funding Information: This work was supported Jinancially by a grant &on1 the Microconturnination Reseurck Consortium ut the Ukiver-sity of' Minnesota. The support of the Conso&un is grate-fidly ucknowled&.

PY - 1998/1/1

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N2 - The spatial distribution of aerosol particles downstream of a critical orifice has been experimentally investigated. The measurements were performed by filtering the aerosol and visualizing the filter deposits. Measurements were made for a range of flow rates, pressures, and particle sizes. The most significant observation was that the particle spatial distributions changed from uniform to nonuniform when the downstream pressure was lowered below about 10 torr. Similar observations were made using in-situ particle monitors. These results may have significance for understanding particulate contamination in vacuum-based semiconductor process equipment.

AB - The spatial distribution of aerosol particles downstream of a critical orifice has been experimentally investigated. The measurements were performed by filtering the aerosol and visualizing the filter deposits. Measurements were made for a range of flow rates, pressures, and particle sizes. The most significant observation was that the particle spatial distributions changed from uniform to nonuniform when the downstream pressure was lowered below about 10 torr. Similar observations were made using in-situ particle monitors. These results may have significance for understanding particulate contamination in vacuum-based semiconductor process equipment.

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Investigation of Aerosol Spatial Distributions Downstream of a Critical Orifice at Low Pressure

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