Investigation of particle generation during the low-pressure chemical vapor deposition of borophosphosilicate glass films

Engineering & Materials Science

• Particle beams 91%
• Low pressure chemical vapor deposition 90%
• Mass spectrometers 78%
• Glass 43%
• Inductively coupled plasma 27%
• Thermophoresis 25%
• Nucleation 19%
• Fourier transforms 18%
• X rays 16%
• Infrared radiation 15%
• Oxygen 14%
• Flow rate 13%
• Decomposition 13%
• Chemical analysis 11%
• Gases 10%
• Industry 8%
• Temperature 7%

Chemical Compounds

• Borophosphosilicate Glass 100%
• Low Pressure Chemical Vapour Deposition 80%
• Particle Beam 64%
• Liquid Film 26%
• Thermal Diffusion 18%
• Pressure 16%
• Inductively Coupled Plasma 13%
• Phosphine 12%
• Nucleation 11%
• Flow Kinetics 10%
• Flow 8%
• Decomposition 8%
• X-Ray 8%
• Fourier Transform Infrared Spectroscopy 7%
• Dioxygen 6%

Physics & Astronomy

• low pressure 46%
• vapor deposition 42%
• glass 32%
• reactors 26%
• particle beams 17%
• mass spectrometers 15%
• phosphines 6%
• thermophoresis 6%
• thresholds 6%
• coolers 5%
• scanners 4%
• vapor phases 4%
• flow velocity 4%
• chambers 3%
• decomposition 3%
• wafers 3%
• nucleation 3%
• oxygen 3%
• x rays 2%
• temperature 1%
• energy 1%