Investigation of thermophoretic protection with speed-controlled particles at 100, 50, and 25 mTorr

Engineering & Materials Science

• Thermophoresis 100%
• Molecules 46%
• Vacuum 41%
• Gases 40%
• Analytical models 40%
• Extreme ultraviolet lithography 34%
• Thermal gradients 24%
• Contamination 22%
• Flow of gases 22%
• Masks 22%
• Particle size 22%
• Momentum 21%

Physics & Astronomy

• thermophoresis 26%
• gases 9%
• vacuum systems 7%
• pinholes 7%
• molecules 6%
• stopping 6%
• low speed 6%
• gas flow 5%
• contamination 5%
• temperature gradients 5%
• masks 5%
• lithography 5%
• momentum 4%
• gradients 4%
• vacuum 4%