Low-cost and facile shrink lithography derived graphene nanoribbon (GNR) was suspended on the channel to form an ion-sensitive field effect transistor (ISFET), and its pH sensing application is presented. By combining a thermoplastic film with a molding process, GNR patterns 50 nm wide were achieved in a low-cost and simple way. Ambipolar characteristics of annealed suspended GNR ISFET present an enhanced ambipolar effect. In comparison, unsuspended GNR and microscale graphene sheets based ISFETs were characterized under the same design, fabrication, and measurement conditions, showing that the suspended GNR ISFET is superior in sensitivity and detection limits.
|Original language||English (US)|
|Title of host publication||2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012|
|Editors||Mehran Mehregany, David J. Monk|
|Publisher||Transducer Research Foundation|
|Number of pages||4|
|State||Published - 2012|
|Event||2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012 - Hilton Head, United States|
Duration: Jun 3 2012 → Jun 7 2012
|Name||Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop|
|Other||2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012|
|Period||6/3/12 → 6/7/12|
Bibliographical notePublisher Copyright:
© 2012 TRF.