Key technologies of thermally actuated sillicon micropump

Cui Tianhong, Zhou Zhaoying, Wang Xiaohao, Ye Xiongying, Yang Yue, Zhang Wendong, Lü Miao, Zhao Yanjun

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

A thermo-driven sillicon micropump with novel structure is presented. The fabrication processes of this micropump are analyzed in summarize and measured in individual experiments.

Original languageEnglish (US)
Number of pages1
JournalJixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering
Volume35
Issue number1
StatePublished - Dec 1 1999

Keywords

  • MEMS
  • Micropump
  • Silicon micromachining

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