Tetragonal L10 FePt films are deposited on the pyramid-type Si substrates fabricated by chemical etching process from (100) Si wafers. The films are composed of different easy-axis orientation FePt grains, most of which with the easy axis along substrate normal, the others with the easy axis tilted from the normal direction. When the magnetic field is applied along the perpendicular direction, the easy-axis tilted grains reverse first, and then the magnetization reversal of the whole film is promoted. Small coercivity, suitable α, and high squareness are obtained. And the coercivity increases when the applied field is tilted from the normal direction.