Linear motion microactuators using piezoelectric thin films

Two novel types of microactuators for linear displacements are presented which use piezoelectric thin films for the electrical-to-mechanical energy process. One actuator uses a folded path or meander line geometry to produce tethered linear displacements. The other actuator uses an inertial recoil mechanism in conjunction with an electrostatic clamp to produce incremental stepping motion. Sufficient repetition of the stepping sequence produces virtually unlimited travel range, being limited by practical considerations such as electrical connections. Electromechanical models for both actuators are developed and are used to quantitatively estimate the performance of actuators designed to a particular set of dimensions. Fabrication procedures for making both microactuators have been developed, and the status of the fabrication efforts is presented.