Lithographic approach to pattern multiple nanoparticle thin films prepared by layer-by-layer self-assembly for microsystems

Tianhong Cui, Feng Hua, Yuri Lvov

Research output: Contribution to journalConference articlepeer-review

26 Scopus citations

Abstract

We report a lithographic approach to pattern multiple types of layer-by-layer (LbL) self-assembled nanoparticle thin films. Polystyrene particles (150 and 64nm) are spatially separated in desired patterns with a feature size of 5-20μm. The process is technically simple, consisting of only two consecutive lift-off steps, and can be applied to various types of nanoparticles. This method can be applied to various types of nanoparticles. Since it is based on the conventional lithographic technique, it provides a simple, reliable, and cheap method to pattern nanoparticles into two-dimensional patterns of microscale pitches for the fabrication of complex microsystems which is composed mainly of functional nanoparticles for the applications to sensing and actuation.

Original languageEnglish (US)
Pages (from-to)501-504
Number of pages4
JournalSensors and Actuators, A: Physical
Volume114
Issue number2-3
DOIs
StatePublished - Sep 1 2004
EventSelected Papers from Transducers 03 - Boston, MA, United States
Duration: Jun 8 2003Jun 12 2003

Keywords

  • Lithograpgy
  • Microsystems
  • Nano self-assembly
  • Nanoparticle
  • Patterning

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