Fingerprint
Dive into the research topics of 'Low-oxygen nitride layers produced by UHV ammonia nitridation of silicon'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Low-oxygen nitride layers produced by UHV ammonia nitridation of silicon
M. A. Shriver, T. K. Higman, S. A. Campbell, C. J. Taylor, J. Roberts
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
2
Scopus
citations