Low temperature chemical vapor deposition of titanium dioxide thin films using tetranitratotitanium (IV)

D. C. Gilmer, W. L. Gladfelter, D. G. Colombo, C. J. Taylor, J. Roberts, S. A. Campbell, H. S. Kim, G. D. Wilk, M. A. Gribelyuk

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

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Engineering & Materials Science

Chemical Compounds