Low temperature chemical vapor deposition of ZrO2 on Si(100) using anhydrous zirconium(IV) nitrate

Ryan C. Smith, Noel Hoilien, Charles J. Taylor, Tiezhong Ma, Stephen A. Campbell, Jeffrey T. Roberts, Matthew Copel, D. A. Buchanan, Michael Gribelyuk, Wayne L. Gladfelter

Research output: Contribution to journal › Article › peer-review

42 Scopus citations

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Engineering & Materials Science

Chemical Compounds