Low-temperature solid phase epitaxial regrowth of silicon for stacked static random memory application

Engineering & Materials Science

• Epitaxial growth 100%
• Silicon 56%
• Data storage equipment 43%
• Amorphous silicon 41%
• Temperature 28%
• Diffraction 10%
• Crystalline materials 10%
• Seed 10%
• Electrons 10%
• Annealing 10%
• Semiconductor materials 9%
• Furnaces 8%
• Lasers 7%
• Fabrication 7%
• Costs 3%

Physics & Astronomy

• epitaxy 70%
• solid phases 66%
• amorphous silicon 39%
• silicon 38%
• current distribution 15%
• margins 15%
• ramps 15%
• seeds 13%
• furnaces 12%
• electric contacts 12%
• retarding 10%
• costs 10%
• fabrication 8%
• annealing 8%
• diffraction 7%
• lasers 6%
• electrons 6%