M-Test Method for Measuring Mechanical Property of Multi-layer in MEMS

Mathematics

• Micro-electro-mechanical Systems 100%
• Mechanical Properties 88%
• Multilayer 85%
• Stiffness 50%
• Cantilever Beam 34%
• Residual Stress 33%
• Young's Modulus 33%
• Cantilever 32%
• Effective Properties 32%
• Shear Stress 29%

Engineering & Materials Science

• MEMS 64%
• Stiffness 48%
• Mechanical properties 44%
• Cantilever beams 38%
• Shear stress 31%
• Residual stresses 30%
• Elastic moduli 29%

Physics & Astronomy

• microelectromechanical systems 66%
• mechanical properties 46%
• stiffness 30%
• cantilever beams 19%
• residual stress 15%
• shear stress 15%
• modulus of elasticity 13%