Abstract
RF sputtered films of FexSi1−x, where x ≈.7, deposited on YZ-LiNbO3, have been used for magnetically variable surface acoustic wave devices. A 1 micron thick film one cm long in the SAW propagation direction had a relative SAW velocity change of 0.02% at 63 MHz and 0.05% at 189 MHz for applied fields of less than 50 Oe after annealing at 200°C for 30 minutes. Magnetic properties (M-H loops and magnetostriction) of the films were measured and correlated with the SAW properties.
Original language | English (US) |
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Pages (from-to) | 919-921 |
Number of pages | 3 |
Journal | IEEE Transactions on Magnetics |
Volume | 16 |
Issue number | 5 |
DOIs | |
State | Published - Sep 1980 |