Original language | English (US) |
---|---|
Pages (from-to) | 2280-2284 |
Number of pages | 5 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 5 |
Issue number | 4 |
DOIs | |
State | Published - Jul 1 1987 |
Externally published | Yes |
Mass spectrometric and ion energy diagnostics in the study of plasma etching and polymerization
L. M. Ferreiro, D. W. Ernie, J. F. Evans
Research output: Contribution to journal › Article › peer-review
13
Scopus
citations