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Materials and processes for high k gate stacks: Results from the FEP transition center
C. M. Osburn, S. A. Campbell, A. Demkov, E. Eisenbraun, E. Garfunkel, T. Gustafsson, A. I. Kingon, J. Lee, D. J. Lichtenwalner, G. Lucovsky, T. P. Ma, J. P. Maria, V. Misra, R. J. Nemanich, G. N. Parsons, D. G. Schlom, S. Stemmer, R. M. Wallace, J. Whitten
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
3
Scopus
citations