Measurement of absolute radical densities in a plasma using modulated-beam line-of-sight threshold ionization mass spectrometry

Sumit Agarwal; Guido W.W. Quax; M. C.M. Van de Sanden; Dimitrios Maroudas; Eray S. Aydil

doi:10.1116/1.1627767

Measurement of absolute radical densities in a plasma using modulated-beam line-of-sight threshold ionization mass spectrometry

Sumit Agarwal, Guido W.W. Quax, M. C.M. Van de Sanden, Dimitrios Maroudas, Eray S. Aydil

Chemical Engineering and Materials Science

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Abstract

Measurement of absolute radical densities using line-of-sight threshold ionization mass spectrometry (LOS-TIMS) was discussed. The O, O ₂ and Ar densities and the average neutral-gas temperature in an O ₂/Ar electrical discharge were measured as a function of pressure in the plasma chamber. Collisions within the molecular beam extracted from the discharge was also studied for higher plasma chamber pressures. It was found that the O atom density increases with pressure and O ₂ mole fraction in the feed gas and is in the range of 2.1×10 ¹⁸-2.6×10 ¹⁹ m ^-3.

Original language	English (US)
Pages (from-to)	71-81
Number of pages	11
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	22
Issue number	1
DOIs	https://doi.org/10.1116/1.1627767
State	Published - Jan 2004

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Measurement of absolute radical densities in a plasma using modulated-beam line-of-sight threshold ionization mass spectrometry. / Agarwal, Sumit; Quax, Guido W.W.; Van de Sanden, M. C.M. et al.
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 22, No. 1, 01.2004, p. 71-81.

Research output: Contribution to journal › Article › peer-review

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AB - Measurement of absolute radical densities using line-of-sight threshold ionization mass spectrometry (LOS-TIMS) was discussed. The O, O 2 and Ar densities and the average neutral-gas temperature in an O 2/Ar electrical discharge were measured as a function of pressure in the plasma chamber. Collisions within the molecular beam extracted from the discharge was also studied for higher plasma chamber pressures. It was found that the O atom density increases with pressure and O 2 mole fraction in the feed gas and is in the range of 2.1×10 18-2.6×10 19 m -3.

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Measurement of absolute radical densities in a plasma using modulated-beam line-of-sight threshold ionization mass spectrometry

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