Measurement of air pollution acidic gases in a class 10 cleanroom

Wai S. Poon, David Y.H. Pui, Benjamin Y.H. Liu, Jung sung Hwang

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

The concentrations of gaseous inorganic acidic air pollutants (HNO2, SO2) inside a class 10 cleanroom were measured in winter and summer by denuder method. The results were compared to those found in the ambient air. It was found that the concentration of HNO2 inside the cleanroom ranged from 0.10 ppb to 0.61 ppb in summer and winter. The concentration of the SO2 inside the cleanroom ranged from 0.85 to 2.93 ppb in winter, and 0.04 to 0.15 ppb in summer. The concentration of HNO2 in the ambient air was comparable to that measured in cleanroom. No SO2 was measured in the cleanroom in summer. The cause is believed to be due to the removal of SO2 in the ventilation system.

Original languageEnglish (US)
Pages (from-to)384-389
Number of pages6
JournalInstitute of Environmental Sciences - Proceedings, Annual Technical Meeting
StatePublished - Dec 1 1995
EventProceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences - Anaheim, CA, USA
Duration: Apr 30 1995May 5 1995

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