TY - GEN
T1 - Mechanical design of thermally invariant mirrors coated by atomic layer deposition
AU - Gabriel, Nicholas T.
AU - Kim, Sangho S.
AU - Talghader, Joseph J.
PY - 2010
Y1 - 2010
N2 - Thermal expansion mismatch between the layers of an optical coating and its substrate can cause changes in the shape of a mirror or optical element. It is shown that with knowledge of the linear stress-temperature relationship for each film, one can design coatings to have a specific thermal deformation characteristic, although the requirements for thin film repeatability are high. Such coatings are demonstrated using atomic layer deposition (ALD), and thermally invariant ALD coatings are investigated through optomechanical simulation.
AB - Thermal expansion mismatch between the layers of an optical coating and its substrate can cause changes in the shape of a mirror or optical element. It is shown that with knowledge of the linear stress-temperature relationship for each film, one can design coatings to have a specific thermal deformation characteristic, although the requirements for thin film repeatability are high. Such coatings are demonstrated using atomic layer deposition (ALD), and thermally invariant ALD coatings are investigated through optomechanical simulation.
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M3 - Conference contribution
AN - SCOPUS:84896767109
SN - 9781557528919
T3 - Optics InfoBase Conference Papers
BT - Optical Interference Coatings, OIC 2010
T2 - Optical Interference Coatings, OIC 2010
Y2 - 6 June 2010 through 11 June 2010
ER -