TY - CHAP
T1 - Mechanics of interfacial crack propagation in microscratching
AU - de Boer, Maarten P.
AU - Nelson, John C.
AU - Gerberich, William W
PY - 1996
Y1 - 1996
N2 - A new probing technique has been developed to test thin film mechanical properties. In the Microwedge Scratch Test (MWST), a wedge shaped diamond indenter tip is drawn along a fine line, while simultaneously being driven into the line. We compare microwedge scratching of Zone 1 and Zone T thin film specimens of sputtered W on SiO2. Symptomatic of its poor mechanical properties, the Zone 1 film displays three separate crack systems. Because of its superior grain boundary strength, the Zone T film displayed only one of these - an interfacial crack system. Using bimaterial linear elastic fracture mechanics, governing equations are developed for propagating interfacial cracks, including expressions for strain energy release rate, bending strain, and mode mixity. Grain boundary fracture strength information may be deduced from the Zone 1 films, while adhesion may be inferred from the Zone T films.
AB - A new probing technique has been developed to test thin film mechanical properties. In the Microwedge Scratch Test (MWST), a wedge shaped diamond indenter tip is drawn along a fine line, while simultaneously being driven into the line. We compare microwedge scratching of Zone 1 and Zone T thin film specimens of sputtered W on SiO2. Symptomatic of its poor mechanical properties, the Zone 1 film displays three separate crack systems. Because of its superior grain boundary strength, the Zone T film displayed only one of these - an interfacial crack system. Using bimaterial linear elastic fracture mechanics, governing equations are developed for propagating interfacial cracks, including expressions for strain energy release rate, bending strain, and mode mixity. Grain boundary fracture strength information may be deduced from the Zone 1 films, while adhesion may be inferred from the Zone T films.
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M3 - Chapter
AN - SCOPUS:0030407270
T3 - Materials Research Society Symposium - Proceedings
BT - Thin Films
A2 - Gerberich, W.W.
A2 - Gao, H.
A2 - Sundgren, J.E.
A2 - Baker, S.P.
T2 - Proceedings of the 1996 MRS Spring Meeting
Y2 - 8 April 1996 through 11 April 1996
ER -