TY - JOUR
T1 - MEMS for integrated diagnostic applications
AU - Polla, D.
AU - Francis, L.
AU - Robbins, W.
AU - Harjani, R.
PY - 1997
Y1 - 1997
N2 - Microelectromechanical Systems (MEMS) technology is currently being applied to the structural health monitoring of critical aircraft components. The approach integrates acoustic emission (AE) and vibration monitoring devices with signal processing electronics to provide real-time indicators of incipient failure of aircraft (helicopter) components with a known history of catastrophic failure due to fracture. This paper describes MEMS-based sensor development, piezoelectric microsensor design and fabrication, and signal processing approaches directed toward the realization of inexpensive, multiple, MEMS-based integrated diagnostics "coupons". Initial feasibility data are presented.
AB - Microelectromechanical Systems (MEMS) technology is currently being applied to the structural health monitoring of critical aircraft components. The approach integrates acoustic emission (AE) and vibration monitoring devices with signal processing electronics to provide real-time indicators of incipient failure of aircraft (helicopter) components with a known history of catastrophic failure due to fracture. This paper describes MEMS-based sensor development, piezoelectric microsensor design and fabrication, and signal processing approaches directed toward the realization of inexpensive, multiple, MEMS-based integrated diagnostics "coupons". Initial feasibility data are presented.
UR - http://www.scopus.com/inward/record.url?scp=0031356966&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0031356966&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0031356966
VL - 7
SP - 19
EP - 24
JO - American Society of Mechanical Engineers, Tribology Division, TRIB
JF - American Society of Mechanical Engineers, Tribology Division, TRIB
ER -